Guided wave photonics for embedded systems

This group is involved in researching focused on the development of new wave-guiding concepts such as Half Etch Slot [1,2,3] and Slot ARROW [4] (see figure 1) allowing integration of low refractive index material bond on Si wafer with CMOS compatible process.
new guided optics concept

The 3 pictures on top are respectively to the left to right the refractive indexes cross section of an half etch slot waveguide, mapping of the TM-like mode and fabrication of a Mach-Zehnder modulator. The 3 pictures on the bottom are respectively to the left to the right the refractive indexes cross section of a slot ARROW waveguide, mapping of the TE-like mode and first demonstration of light propagation at lambda = 1.55 µm.

This project allows homemade development such as :

  • modeling tools (finite Difference Full Vectorial mode solver, Mode Matching Method and Fourier Modal Method) for design of basic building blocks for optical routing
  • process developments thanks to NanoLyon cleanroom facilities (ebeam, laser and holographic lithographies, ALD, PECVD and sputtering material deposition, RIE and ICP etching tools)
  • integrated optics set ups (linear, non linera, temperature and polarization characterizations).

We can notice that this axis develops in close collaboration with ST Microelectronics and UMI of Sherbrooke.
This operation, widely involved within the framework of the European program (STREP) SITOGA for realization of ultrafast modulator based on HES concept and IPCEI for sensor applications (bio-photonics and accelerometer).


[1] P. Castera, A. M. Gutierrez, D. Tulli, S. Cueff, R. Orobtchouk, P. Rojo Romeo, G. Saint-Girons, P. Sanchis, “Electro-Optical Modulation based on Pockels effect in BaTiO3 with a Multi-Domain Structure”, IEEE Photonics Technology Letters , Vol. 28(6), pp. 990-993, 2016.

[2] X. Hu, S. Cueff, P. Rojo Romeo, R. Orobtchouk, “Modeling the anisotropic electro-optic interaction in hybrid silicon-ferroelectric optical modulator”, Optics Express, Vol. 23, pp. 1699-1714, 2015.

[3] R. Orobtchouk, A. Belarouci, B. Vilquin, P. Rojo Romeo, “Efficient integration of low refractive index active materials on CMOS compatible photonics platform based on half etch slot waveguide”, Photonics North, 21-23 May 2019 (Invited paper).

[4] R. Orobtchouk, “Nouveau guide d’optique intégrée utilisant une combinaison d’effets SLOT ARROW”, brevet n° FR1555755 du 23 juin 2015.

Group Members

  • Coordinator: Régis Orobtchouk
  • Permanent: A. Belarouci, P. Rojo Romeo, S. Cueff, C. Monat, C. Grillet
  • PhD: M. Calvo, E. Kempf
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